Its characteristics include the following steps: step 1: place molybdenum powder and niobium powder in the mixing tank of the mixer, seal the mixing tank and vacuum it, then stir and mix the molybdenum powder and niobium powder evenly under the condition of argon gas protection to obtain the mixed powder; The mass ratio of molybdenum powder to niobium powder is (9 ~ 19) : 1; Step 2. The mixed powder mentioned in step 1 is cold isostatic pressed to obtain the slab, and then the slab is pre-sintered under the condition of vacuum or hydrogen atmosphere protection to obtain the precast blank of molybdenum-niobium alloy. The pressure of the cold isostatic pressure is 100MPa ~ 200MPa, and the holding time is 5min ~ 10min.
The specific process of the pre-sintering treatment is as follows: Under the condition that the heating rate is 2.5℃/min ~ 4℃/min, the temperature rises to 800℃ ~ 1000℃ for 60min ~ 120min and then rises to 1200℃ ~ 1500℃ for 120min ~ 180min and then rises to 1600℃ ~ 1700℃ for 120min ~ 180min under the condition that the heating rate is 1℃/min ~ 2.5℃/min. Step 3. Turning and milling the precast molybdenum-niobium alloy blank described in step 2 to its surface roughness of 1.0m ~ 3.0m, and then hot isostatic pressing is carried out on the precast blank of molybdenum-niobium alloy after turning and milling to obtain molybdenum-niobium alloy parts. The pressure of the thermal isostatic pressure is 100MPa ~ 200MPa, the temperature is 1200℃ ~ 1500℃, and the holding time is 1h ~ 5h. Step 4. Sputtering target material of molybdenum-niobium alloy is obtained by machining and surface grinding the molybdenum-niobium alloy parts mentioned in step 3.
