Barrier layers and diffusion barriers, application scenarios: In chip interconnection structures, they serve as barrier layers for copper wiring (such as Cu/V/TaN multi-layer structures). Advantages: The high melting point (1910℃) and low diffusion coefficient of vanadium can prevent copper from penetrating into the silicon substrate, avoiding short circuits in the device. Meanwhile, the good adhesion of vanadium to copper and silicon can enhance the interface stability. Electrodes and conductive layers, application scenarios: source/drain electrodes of power semiconductors (such as IGBTs), or gate materials of thin-film transistors (TFT). Advantages: Although the electrical conductivity of vanadium (approximately 2.1×107 S/m) is lower than that of copper, it has better high-temperature resistance and is suitable for high-temperature processes (such as annealing treatment). Magnetic storage and spintronics, application scenarios: tunnel junction barrier layer or magnetic buffer layer of magnetoresistive random access memory (MRAM). Advantages: Alloys formed by vanadium with elements such as iron and cobalt (such as FeV, CoV) have controllable magnetic anisotropy, adjustable magnetoresistance effect, and can increase storage density.
In the field of optics and optoelectronics, infrared optical films, application scenarios: anti-reflection films or protective films for infrared detector Windows and thermal imager lenses. Advantages: Vanadium has a high transmittance in the mid-infrared band (3-15μm), is resistant to atmospheric corrosion, and can maintain optical performance for a long time. Intelligent temperature control film, application scenarios: VO₂ phase change film for thermal control coatings of smart Windows and spacecraft (prepared by oxidation after sputtering vanadium target materials). Advantages: VO2 undergoes a metal-insulator phase transition at 68℃ and can dynamically adjust the infrared light reflectivity (reflecting heat at high temperatures and transmitting heat at low temperatures), achieving energy conservation and temperature control.
