Nickel rhenium alloy target and preparation method thereof. The nickel-rhenium alloy target material includes nickel, rhenium and a metal composition, the first metal composition includes aluminum, zirconium or their combination, the total number of atoms in the nickel-rhenium alloy target material as a benchmark, the content of rhenium is greater than 0 atomic percentage and less than or equal to 7 atomic percentage, the total content of the first metal composition is greater than 0 atomic percentage and less than or equal to 3 atomic percentage, The total content of rhenium and the first metal component is greater than 0 atomic percentage and less than 10 atomic percentage. By controlling the composition of the nickel-rhenium alloy target, the nickel-rhenium alloy target of the invention can be applied to the crystal seed layer of the vertical magnetic recording media formed by sputtering, so as to improve its recording density.
With the increasing demand for information storage capacity of magnetic recording media, how to improve the recording quality of magnetic recording media has been an active research topic. According to the direction of magnetization of the magnetic head, the magnetic recording media can be divided into horizontal magnetic recording media and vertical magnetic recording media. Among them, the recording density of horizontal magnetic recording media has been developed to the limit; Therefore, the existing technology has turned to vertical magnetic recording media to improve the recording density of magnetic recording media by refining recording units and laying vertical layered structures.
By making the nickel-rhenium alloy target contains an appropriate amount of rhenium as a refining metal, it can help to fine and homogenize the grain size of the nickel-rhenium alloy target, to ensure that the average grain size of the nickel-rhenium alloy target is less than or equal to 30 microns, and the average grain size uniformity is less than or equal to 20%; Accordingly, compared with the prior art nickel-based target material, the invention can specifically solve the problems of coarse grain size and large grain size variation of nickel-based target material. At the same time, by making the nickel-rhenium alloy target containing a specific type of the first metal composition and containing an appropriate amount of the first metal composition, in addition to maintaining the effect of fine and uniform nickel-rhenium alloy target grain size, but also to improve the crystallinity of nickel-rhenium alloy target, In the face centered cubic structure of nickel-rhenium alloy targets, the ratio of strength in the direction of crystals exceeds 62 percent.
