The preparation method of sputtering titanium ring belongs to the technical field of titanium metal products processing. Ti ingots with purity above 99.95% are selected to be made into titanium slats after forging, rolling, heat treatment, leveling and machining. After removing the dirt on the surface, the surface of the titanium strip is engraved with laser. Then the titanium strip is rolled into a titanium ring with a winding machine; Sputtering titanium ring was obtained after cleaning and drying. The Ti strip processed by high temperature heat treatment process has low stress after rolling. Using laser engraving, can be processed according to the need of all kinds of grain, improve the quality of the product, ensure the product quality is stable and consistent, while improving the work efficiency, reduce the cost.
Physical vapor deposition (PVD) plays an important role in semiconductor manufacturing process. PVD is used to fabricate metallization processes such as interconnect, contact, through-hole, barrier layer and bond layer. Titanium ring is used with high purity Ti target, which can be used to prepare Ti metallized film by sputtering. It is mainly used for TiN/Ti barrier layer, TiN anti-reflection layer (ARC) and TiSi2 contact in aluminum metallization process of integrated circuit. The main functions of titanium ring are:
The application environment and application of titanium ring put forward high requirements for its surface quality and cleanliness. The patent CN101920435A disclosed the traditional preparation method of titanium ring :Ti strip preparation - coiling - welding - machining - knurling - cutting - cleaning, the process is complicated, Ti strip surface grain needs to be determined by knurling knife, and after a knurling grain inconsistency probability is large, need more knurling several times, low efficiency. It takes a lot of manpower and energy to ensure stable product quality.
The laser with pulse width of 50ns, average power of 60W, pulse frequency of 20kHz, and engraving linear speed of 1500mm/s was selected to carve diamond lines on titanium long slat. The control thickness of each layer was 0.05mm, and the duration was about 5h. The winding machine was used to roll round, roundness was 0.8mm, 20% nitric acid was used. The titanium ring was cleaned with 5% hydrofluoric acid for 4min, then washed with water and dried by anhydrous ethanol. The surface of the titanium ring was clean and clean, and the surface showed a uniform and smooth Ti metal color.
