Transition chain structure of tantalum wire and spring

Firmetal, 2021-1-15 09:38:00 PM

In CVD process, tantalum wire is used as heating wire. In the process of tantalum wire carbonization and diamond growth, in order to ensure uniform temperature field and good contact with electrode, it must always be kept in a straight state. Therefore, spring is introduced as a tool to straighten tantalum wire. As shown in figure 1, spring 100 straight tantalum 200 state diagram, the spring of 100 and tantalum 200 failed the fitting connection, due to the spring 100 only under a certain temperature to maintain elasticity, the heat resistance is limited, and growth stages of spring 100 carbide has been thermal radiation effects make temperature is higher and higher, if the temperature of the spring of 100 more than the spring of 100 limit of heat-resistant, spring 100, spring 100 failure will lead to the following points: (1), may be a direct result of tantalum wire fracture, was forced to suspend production process; (2) It may lead to downward bending of tantalum wire and affect the uniformity of working temperature field, thus affecting the quality of diamond coating; (3), the spring failure must be scrapped, the price of the spring is relatively expensive, directly lead to the rise of costs.

In the process of tantalum carbide and diamond growth, tantalum wire due to heat expansion, there will be a long time is in a state of elongation slowly, namely, tantalum wire will be in contact with the electrode wire frame slip a length (the length of the slip elongation), but in tantalum wire and wire electrode contact point temperature is very high, may lead to local sintering for contact point is not smooth, thus making tantalum stay cannot slide in the point of contact for short periods of time, in this period of time of cannot slide, tantalum wire between the two electrode wire rack is still growing, constantly elongation, temporarily cannot slide, will cause the tantalum wire between the two electrode holder bending, bending will vibrate, Thus, the chain ring and spring behind the contact point of the tantalum wire frame are driven to vibrate together. Once the sintering phenomenon of the local sintering part is relieved, the spring will shorten a section of length instantly and easily break the tantalum wire.

A connection chain structure of tantalum and spring, whose character is: the transition chain, the second transition chain including the first and the third transition of at least one chain, described the first transition chain includes the first transition and described respectively connected to the first at the ends of the transition of the first connection part, two described the first connection part respectively connected with the first transition of arc described. 2. The connection according to claim 1 the transition of tantalum and spring chain structure, its characteristic is: first described two connections and described the first transition form overall as "one" glyph structure, each described the first connection part including arc and and described with circular arc connected parallel to the ministry, described in parallel and described the first transition of parallel. 3. According to the transition chain structure connecting tantalum wire and spring mentioned in claim 1, its characteristics are as follows: the second transition chain is composed of several chain rings, and the chain ring has an opening.

Tag: tantalum wire, tantalum

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